STRUCTURE AND PROPERTIES OF QUASI-AMORPHOUS FILMS PREPARED BY ION-BEAM TECHNIQUES

被引：242
作者：
WEISSMANTEL, C
BEWILOGUA, K
DIETRICH, D
ERLER, HJ
HINNEBERG, HJ
KLOSE, S
NOWICK, W
REISSE, G
机构：
来源：
THIN SOLID FILMS | 1980年 / 72卷 / 01期
关键词：
804 Chemical Products Generally - 813 Coatings; Finishes and Thin Film Deposition - 932 High Energy Physics; Nuclear Physics; Plasma Physics;
D O I：
10.1016/0040-6090(80)90554-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
27
引用
收藏
页码：19 / 31
页数：13
相关论文
共 27 条
[1]  
BEMAN R, 1965, PHYSICAL PROPERTIES, P40
[2]   STRUCTURE AND PROPERTIES OF TRANSPARENT AND HARD CARBON-FILMS [J].
BEWILOGUA, K ;
DIETRICH, D ;
PAGEL, L ;
SCHURER, C ;
WEISSMANTEL, C .
SURFACE SCIENCE, 1979, 86 (JUL) :308-313
[3]   ON THE NATURE OF RADIATION DAMAGE IN METALS [J].
BRINKMAN, JA .
JOURNAL OF APPLIED PHYSICS, 1954, 25 (08) :961-970
[4]   HYDROGENATION AND THE DENSITY OF DEFECT STATES IN AMORPHOUS SILICON [J].
BRODSKY, MH ;
KAPLAN, D .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1979, 32 (1-3) :431-435
[5]   PLASMA PREPARATIONS OF AMORPHOUS SILICON FILMS [J].
BRODSKY, MH .
THIN SOLID FILMS, 1978, 50 (MAY) :57-67
[6]   NATURE OF METASTABLE PHASES OF CARBON [J].
DERJAGUIN, BV ;
FEDOSEEV, DV ;
VARNIN, VP ;
VNUKOV, SP .
NATURE, 1977, 269 (5627) :398-399
[7]   PHASE-TRANSITIONS UNDER SHOCK-WAVE LOADING [J].
DUVAL, GE ;
GRAHAM, RA .
REVIEWS OF MODERN PHYSICS, 1977, 49 (03) :523-579
[8]  
EBERSBACH U, 1979, Z PHYS CHEM-LEIPZIG, V260, P938
[9]  
GASCHTOLD BN, 1970, ELECTR TECHNOL USSR, V12, P58
[10]   GROWTH OF CARBON-FILMS WITH RANDOM ATOMIC-STRUCTURE FROM ION IMPACT DAMAGE IN A HYDROCARBON PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1979, 58 (01) :107-116
123