STOCHASTIC-EQUATIONS OF MOTION FOR EPITAXIAL-GROWTH

被引:174
作者
VVEDENSKY, DD [1 ]
ZANGWILL, A [1 ]
LUSE, CN [1 ]
WILBY, MR [1 ]
机构
[1] GEORGIA INST TECHNOL, SCH PHYS, ATLANTA, GA 30332 USA
来源
PHYSICAL REVIEW E | 1993年 / 48卷 / 02期
关键词
D O I
10.1103/PhysRevE.48.852
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We report an analytic derivation of the Langevin equations of motion for the surface of a solid that evolves under typical epitaxial-growth conditions. Our treatment begins with a master-equation description of the microscopic dynamics of a solid-on-solid model and presumes that all surface processes obey Arrhenius-type rate laws. Our basic model takes account of atomic deposition from a low-density vapor, thermal desorption, and surface diffusion. Refinements to the model include the effects of hot-atom knockout processes and asymmetric energy barriers near step edges. A regularization scheme is described that permits a (nonrigorous) passage to the continuum limit when the surface is rough. The resulting stochastic differential equation for the surface-height profile generically leads to the behavior at long length and time scales first described by Kardar, Parisi, and Zhang [Phys. Rev. Lett. 56, 889 (1986)] (due to desorption). If evaporation is negligible, the asymptotic behavior is characteristic of a linear model introduced by Edwards and Wilkinson [Proc. R. Soc. London, Ser. A 381,17 (1982)] (due to asymmetric step barriers and/or knockout events). If the latter are absent as well, the surface roughness is determined by an equation independently analyzed by Villain [J. Phys. I 1, 19 (1991)] and Lai and Das Sarma [Phys. Rev. Lett. 66, 2348 (1991)] (which includes only deposition and site-to-site hopping). The consequences of reflection-symmetry breaking in the basic microscopic processes are discussed in connection with step-barrier asymmetry and Metropolis kinetic algorithms.
引用
收藏
页码:852 / 862
页数:11
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