STOCHASTIC-EQUATIONS OF MOTION FOR EPITAXIAL-GROWTH

被引:174
作者
VVEDENSKY, DD [1 ]
ZANGWILL, A [1 ]
LUSE, CN [1 ]
WILBY, MR [1 ]
机构
[1] GEORGIA INST TECHNOL, SCH PHYS, ATLANTA, GA 30332 USA
来源
PHYSICAL REVIEW E | 1993年 / 48卷 / 02期
关键词
D O I
10.1103/PhysRevE.48.852
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
We report an analytic derivation of the Langevin equations of motion for the surface of a solid that evolves under typical epitaxial-growth conditions. Our treatment begins with a master-equation description of the microscopic dynamics of a solid-on-solid model and presumes that all surface processes obey Arrhenius-type rate laws. Our basic model takes account of atomic deposition from a low-density vapor, thermal desorption, and surface diffusion. Refinements to the model include the effects of hot-atom knockout processes and asymmetric energy barriers near step edges. A regularization scheme is described that permits a (nonrigorous) passage to the continuum limit when the surface is rough. The resulting stochastic differential equation for the surface-height profile generically leads to the behavior at long length and time scales first described by Kardar, Parisi, and Zhang [Phys. Rev. Lett. 56, 889 (1986)] (due to desorption). If evaporation is negligible, the asymptotic behavior is characteristic of a linear model introduced by Edwards and Wilkinson [Proc. R. Soc. London, Ser. A 381,17 (1982)] (due to asymmetric step barriers and/or knockout events). If the latter are absent as well, the surface roughness is determined by an equation independently analyzed by Villain [J. Phys. I 1, 19 (1991)] and Lai and Das Sarma [Phys. Rev. Lett. 66, 2348 (1991)] (which includes only deposition and site-to-site hopping). The consequences of reflection-symmetry breaking in the basic microscopic processes are discussed in connection with step-barrier asymmetry and Metropolis kinetic algorithms.
引用
收藏
页码:852 / 862
页数:11
相关论文
共 96 条
[1]   COMPUTER SIMULATION OF VAPOR DEPOSITION ON 2-DIMENSIONAL LATTICES [J].
ABRAHAM, FF ;
WHITE, GM .
JOURNAL OF APPLIED PHYSICS, 1970, 41 (04) :1841-&
[2]   MICROSCOPIC THEORY OF SURFACE-DIFFUSION [J].
ALANISSILA, T ;
YING, SC .
PHYSICAL REVIEW B, 1990, 42 (16) :10264-10274
[3]   MORPHOLOGICAL INSTABILITY OF A TERRACE EDGE DURING STEP-FLOW GROWTH [J].
BALES, GS ;
ZANGWILL, A .
PHYSICAL REVIEW B, 1990, 41 (09) :5500-5508
[4]   MACROSCOPIC MODEL FOR COLUMNAR GROWTH OF AMORPHOUS FILMS BY SPUTTER DEPOSITION [J].
BALES, GS ;
ZANGWILL, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (01) :145-149
[5]   GROWTH DYNAMICS OF CHEMICAL VAPOR-DEPOSITION [J].
BALES, GS ;
REDFIELD, AC ;
ZANGWILL, A .
PHYSICAL REVIEW LETTERS, 1989, 62 (07) :776-779
[6]   FUNDAMENTAL ISSUES IN HETEROEPITAXY - A DEPARTMENT-OF-ENERGY, COUNCIL-ON-MATERIALS-SCIENCE PANEL REPORT [J].
BAUER, EG ;
DODSON, BW ;
EHRLICH, DJ ;
FELDMAN, LC ;
FLYNN, CP ;
GEIS, MW ;
HARBISON, JP ;
MATYI, RJ ;
PEERCY, PS ;
PETROFF, PM ;
PHILLIPS, JM ;
STRINGFELLOW, GB ;
ZANGWILL, A .
JOURNAL OF MATERIALS RESEARCH, 1990, 5 (04) :852-894
[7]  
Binder K., 1979, Monte Carlo methods in statistical physics, P1
[8]  
Bortolani V., 1990, INTERACTION ATOMS MO
[9]   THE GROWTH OF CRYSTALS AND THE EQUILIBRIUM STRUCTURE OF THEIR SURFACES [J].
BURTON, WK ;
CABRERA, N ;
FRANK, FC .
PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL AND PHYSICAL SCIENCES, 1951, 243 (866) :299-358
[10]  
CHERNOV AA, 1987, MORPHOLOGY CRYSTAL A, P207