LITHIUM-NIOBATE RIDGE WAVE-GUIDES FABRICATED BY WET ETCHING

被引：29

作者：

LEE, HJ

SHIN, SY

机构：

[1] Department of Electrical Engineering, Korea Advanced Institute of Science and Technology, Taejon 305-701, 373-1, Kusong-Dong, Yusung-Gu

来源：

ELECTRONICS LETTERS | 1995年 / 31卷 / 04期

关键词：

ETCHING; LITHIUM NIOBATE; OPTICAL WAVE-GUIDES; ION;

D O I：

10.1049/el:19950195

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The authors report a novel method for fabricating proton exchanged LiNbO3 ridge waveguides by the wet etching of proton-exchanged LiNbO3. To demonstrate a simple and easy application of the LiNbO3 ridge waveguide, a Mach-Zehnder interferometric modulator with a selfaligned electrode was fabricated.

引用

页码：268 / 269

页数：2

共 7 条

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