CHARACTERIZATION OF SILICON-NITRIDE PARTICLES SYNTHESIZED IN AN ATMOSPHERIC-PRESSURE CONVECTION-STABILIZED ARC

被引：39

作者：

CHANG, Y ^{[1
]}

KONG, P ^{[1
]}

PFENDER, E ^{[1
]}

机构：

[1] UNIV MINNESOTA,DEPT MECH ENGN,MINNEAPOLIS,MN 55455

来源：

PLASMA CHEMISTRY AND PLASMA PROCESSING | 1989年 / 9卷 / 01期

关键词：

D O I：

10.1007/BF01015827

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：73 / 93

页数：21

共 26 条

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