INSITU STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON

被引:28
作者
DREVILLON, B
机构
关键词
D O I
10.1016/0022-3093(89)90094-X
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
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页码:139 / 144
页数:6
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