TIME-OF-FLIGHT MEASUREMENT OF NONLINEAR EFFECTS IN SPUTTERING BY DIMER IONS

被引：22
作者：
OOSTRA, DJ
VANINGEN, RP
HARING, A
DEVRIES, AE
SARIS, FW
机构：
来源：
PHYSICAL REVIEW LETTERS | 1988年 / 61卷 / 12期
关键词：
D O I：
10.1103/PhysRevLett.61.1392
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：1392 / 1395
页数：4
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