TIME-OF-FLIGHT MEASUREMENT OF NONLINEAR EFFECTS IN SPUTTERING BY DIMER IONS

被引：22

作者：

OOSTRA, DJ

VANINGEN, RP

HARING, A

DEVRIES, AE

SARIS, FW

机构：

来源：

PHYSICAL REVIEW LETTERS | 1988年 / 61卷 / 12期

关键词：

D O I：

10.1103/PhysRevLett.61.1392

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1392 / 1395

页数：4

共 30 条

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