CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPE STUDY OF THE GROWTH-KINETICS OF HEXAGONAL MOSI2 ON (001)SI

被引：38

作者：

CHENG, JY ^{[1
]}

CHENG, HC ^{[1
]}

CHEN, LJ ^{[1
]}

机构：

[1] NATL CHIAO TUNG UNIV,DEPT ELECTR ENGN,HSINCHU,TAIWAN

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 06期

关键词：

D O I：

10.1063/1.337982

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2218 / 2223

页数：6

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