MAGNETIC FORCE MICROSCOPY CURRENT CONTRAST IMAGING - A NEW TECHNIQUE FOR INTERNAL CURRENT PROBING OF ICS

被引：13

作者：

CAMPBELL, AN

COLE, EI

DODD, BA

ANDERSON, RE

机构：

[1] Department 2275, Failure Analysis, Electronics Quality/Reliability Center, Albuquerque

来源：

MICROELECTRONIC ENGINEERING | 1994年 / 24卷 / 1-4期

关键词：

D O I：

10.1016/0167-9317(94)90050-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This invited paper describes recently reported work on the application of magnetic force microscopy (MFM) to image currents in IC conductors [1]. A computer model for MFM imaging of IC currents and experimental results demonstrating the ability to determine current direction and magnitude with a resolution of approximately 1 mA dc and approximately 1 muA ac are presented. The physics of MFM signal generation and applications to current imaging and measurement are described.

引用

页码：11 / 22

页数：12

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