FLOW OF A RAREFIED POLYATOMIC-GAS BETWEEN PARALLEL PLATES

被引:6
作者
LO, SS
LOYALKA, SK
机构
[1] UNIV MISSOURI,NUCL ENGN PROGRAM,COLUMBIA,MO 65211
[2] UNIV MISSOURI,PARTICULATE SYST RES CTR,COLUMBIA,MO 65211
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.576176
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2766 / 2773
页数:8
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