COMPOUNDS IN THE PD-SI AND PT-SI SYSTEM OBTAINED BY ELECTRON-BOMBARDMENT AND POST-THERMAL ANNEALING

被引:23
作者
MAJNI, G
NAVA, F
OTTAVIANI, G
DANNA, E
LEGGIERI, G
LUCHES, A
CELOTTI, G
机构
[1] UNIV LECCE,IST FIS,I-73100 LECCE,ITALY
[2] CNR IST LAMEL,BOLOGNA,ITALY
关键词
D O I
10.1063/1.329253
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4055 / 4061
页数:7
相关论文
共 11 条
[1]  
ANDRESON CL, 1980, P LASER ELECTRON BEA, P485
[2]  
Chu WK., 1978, BACKSCATTERING SPECT
[3]   EVALUATION OF GLANCING ANGLE X-RAY-DIFFRACTION AND MEV HE-4 BACKSCATTERING ANALYSES OF SILICIDE FORMATION [J].
LAU, SS ;
CHU, WK ;
MAYER, JW ;
TU, KN .
THIN SOLID FILMS, 1974, 23 (02) :205-213
[4]  
Mayer Jane, COMMUNICATION
[5]   REVIEW OF BINARY ALLOY FORMATION BY THIN-FILM INTERACTIONS [J].
OTTAVIANI, G .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (05) :1112-1119
[6]   LASER-INDUCED REACTIONS OF PLATINUM AND OTHER METAL-FILMS WITH SILICON [J].
POATE, JM ;
LEAMY, HJ ;
SHENG, TT ;
CELLER, GK .
APPLIED PHYSICS LETTERS, 1978, 33 (11) :918-920
[7]   FORMATION OF SI-ENRICHED METASTABLE COMPOUNDS IN THE PT-SI SYSTEM USING ION-BOMBARDMENT AND POST ANNEALING [J].
TSAUR, BY ;
LIAU, ZL ;
MAYER, JW .
PHYSICS LETTERS A, 1979, 71 (2-3) :270-272
[8]  
Tu K. N., 1978, Thin films. Interdiffusion and reactions, P359
[9]  
VONGURP GW, 1979, APPL PHYS LETT, V35, P273
[10]  
WACHTEL H, COMMUNICATION