ELECTRON-ENERGY DISTRIBUTION FUNCTION IN NEON-NITROGEN MIXTURE POSITIVE-COLUMN

被引：4
作者：
KIMURA, T
OHE, K
机构：
[1] Department of Systems Engineering, Nagoya Institute of Technology, Nagoya
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 12A期
关键词：
ELECTRON ENERGY DISTRIBUTION FUNCTION; NE-N2; MIXTURE; POSITIVE COLUMN; GLOW DISCHARGE; LANGMUIR PROBE; DRUYVESTEYN METHOD;
D O I：
10.1143/JJAP.31.4051
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The electron energy distribution function (EEDF) is measured in a Ne-N2 mixture positive column, whose mixing ratio x (=Ne/Ne+N2) is varied from 0 to 1, keeping the gas pressure and the discharge current constant at 0.52 Torr and 40 mA, respectively. The EEDF drastically shifts to the N2-dominated one by mixing in a small amount of N2.
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页码：4051 / 4052
页数：2
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