Sputtering at very low Gas Pressure

被引：24
|
作者：
Guentherschulze, A.
Meyer, Konrad
机构：
来源：
ZEITSCHRIFT FUR PHYSIK | 1930年 / 62卷 / 9-10期
关键词：
D O I：
10.1007/BF01843478
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：607 / 618
页数：12
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