Sputtering at very low Gas Pressure

被引：24

|

作者：

Guentherschulze, A.

Meyer, Konrad

机构：

来源：

ZEITSCHRIFT FUR PHYSIK | 1930年 / 62卷 / 9-10期

关键词：

D O I：

10.1007/BF01843478

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

收藏

页码：607 / 618

页数：12

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