STRUCTURE DEPENDENCE OF RADIATION-DAMAGE DEPTHS AFTER ION-IMPLANTATION

被引：18

作者：

FRIEDLAND, E

FLETCHER, M

机构：

[1] Department of Physics, University of Pretoria, Pretoria

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1992年 / 64卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(92)95473-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Single crystals of palladium, platinum and cobalt were implanted with 150 keV argon ions at temperatures of 77, 300 and 573 K. Damage depths were analyzed by alpha-particle channeling in a backscattering geometry for different lattice orientations. The observed damage depths exceeded the projected ion ranges significantly in all cases. For palladium this effect was nearly independent of the implantation temperature, whilst an appreciable reduction of the damage depth was found for platinum at 573 K. For cobalt a dependence on implantation direction was observed, indicating a structure dependence of damage depths.

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页码：242 / 245

页数：4

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