EFFECT OF ULTRASONIC VIBRATIONS OF SUBSTRATE ON GROWTH OF THIN METAL FILMS

被引：12
作者：
CHOPRA, KL
RANDLETT, MR
机构：
来源：
APPLIED PHYSICS LETTERS | 1967年 / 11卷 / 06期
关键词：
D O I：
10.1063/1.1755097
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：202 / &
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