FABRICATION OF LITAO3 OPTICAL WAVE-GUIDE BY H+ EXCHANGE METHOD

被引：35

作者：

TADA, K

MURAI, T

NAKABAYASHI, T

IWASHIMA, T

ISHIKAWA, T

机构：

[1] Department of Electronic Engineering, University of Tokyo, Tokyo, Bunkyo-ku, 113

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1987年 / 26卷 / 03期

关键词：

D O I：

10.1143/JJAP.26.503

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

LiTaO3 is a promising material for optical devices because of its resistance against optical damage. In this work we have successfully fabricated waveguides on z-cut LiTaO3 wafers by the proton exchange method and have propagated several modes in them. Both the increment of the refractive index and the `exchange coefficient’ were determined optically. The effect of an annealing process was also studied. The propagation loss was measured to be 1 dB/cm. © 1987 IOP Publishing Ltd.

引用

页码：503 / 504

页数：2