LASER-ABLATION AS A PROCESSING TECHNIQUE FOR METALLIC AND POLYMER LAYERED STRUCTURES

被引：7
作者：
GUZZO, EE
PRESTON, JS
机构：
[1] MCMASTER UNIV,CTR ELECTROPHOTON MAT & DEVICES,HAMILTON L8S 4L8,ONTARIO,CANADA
[2] MCMASTER UNIV,DEPT ENGN PHYS,HAMILTON L8S 4L8,ONTARIO,CANADA
来源：
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | 1994年 / 7卷 / 01期
基金：
加拿大自然科学与工程研究理事会;
关键词：
D O I：
10.1109/66.286834
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A study of the laser ablation process for application in processing metallic and polymer layered structures is presented. The central result of this study is that, by operating with laser pulses of different fluences, it is possible to selectively remove polymer overlayers on metallic films and metallic films from polymer layers, provided the metallic films are sufficiently thin. Careful choice of the fluence allowed both of these processes to be carried out with minimal damage to the underlying material. The damage produced has been characterized by laser processing through visual inspection, profilometry, and electron microscopy. In the case of polymer layers, the effect of exposure to laser irradiation through spectroscopic studies in the infrared, visible, and ultraviolet portion of the spectrum has also been studied. For the metallic layers, we have correlated the visible damage observed with changes in the electrical resistivity of the films.
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页码：73 / 78
页数：6
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