DCM-POLYIMIDE SYSTEM FOR TRIPLE-STACK POLED POLYMER ELECTROOPTIC DEVICES

被引：68
作者：
ERMER, S
VALLEY, JF
LYTEL, R
LIPSCOMB, GF
VANECK, TE
GIRTON, DG
机构：
[1] Lockheed Palo Alto Research Laboratory, Palo Alto, CA 94304, O/9350, B/204
来源：
APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 19期
关键词：
D O I：
10.1063/1.108262
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report development of the first all-polyimide system (cladding/core/cladding) suitable for fabrication of electro-optic waveguide devices on silicon substrates. The cladding layers are spun from a low optical loss, commercially available polyimide that is suitable for multilayer stacks. The electro-optic material consists of this same polyimide as host to a commercially available guest chromophore and is based upon our prior work on thermoplastic polyimides [J. F. Valley, J. W. Wu, S. Ermer, M. Stiller, E. S. Binkley, J. T. Kenney, G. F. Lipscomb, and R. Lytel, Appl. Phys. Lett. 60, 160 (1992)]. We present the materials and process development methodology with the results for this polymer system and demonstrate it by fabrication of an all-polyimide Mach-Zehnder modulator operating at 830 nm.
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页码：2272 / 2274
页数：3
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