VERY SMALL (GREATER-THAN 20 NM) LITHOGRAPHIC WIRES, DOTS, RINGS, AND TUNNEL-JUNCTIONS

被引：80

作者：

DOLAN, GJ ^{[1
]}

DUNSMUIR, JH ^{[1
]}

机构：

[1] AT&T BELL LABS,MURRAY HILL,NJ 07974

来源：

PHYSICA B | 1988年 / 152卷 / 1-2期

关键词：

D O I：

10.1016/0921-4526(88)90060-9

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：7 / 13

页数：7

共 30 条

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