EFFECTS OF THE PLASMA-WALL SHEATH ON TRANSPORT

被引:12
作者
MANDREKAS, J
SINGER, CE
RUZIC, DN
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574443
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2315 / 2318
页数:4
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