INSITU OBSERVATION OF POLYSILICON NUCLEATION AND GROWTH

被引：19

作者：

HOTTIER, F

CADORET, R

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1982年 / 56卷 / 02期

关键词：

D O I：

10.1016/0022-0248(82)90448-1

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：304 / 312

页数：9

共 23 条

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