DYNAMIC CALCULATIONS FOR RHEED FROM MBE GROWING SURFACES .1. GROWTH ON A LOW-INDEX SURFACE

被引:22
作者
PENG, LM
WHELAN, MJ
机构
来源
PROCEEDINGS OF THE ROYAL SOCIETY OF LONDON SERIES A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES | 1991年 / 432卷 / 1885期
关键词
D O I
10.1098/rspa.1991.0013
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Dynamical diffraction calculations have been made for reflection high-energy electron diffraction (RHEED) from molecular beam epitaxy (MBE) growing surfaces. Effects due to both the diffraction and growth conditions on the RHEED intensity oscillations during MBE growth have been investigated in detail for perfect layer growth, non-diffusive, diffusive growth, and distributed growth on a low-index surface. The results are compared with the kinematic diffraction theory, and are shown to be able to reproduce almost all features of measured RHEED intensity oscillations from low-index surfaces.
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页码:195 / 213
页数:19
相关论文
共 42 条
[1]  
Bethe H, 1928, ANN PHYS-BERLIN, V87, P55
[2]  
Chang LL, 1985, NATO ASI SER E
[3]   ORIGIN OF REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION INTENSITY OSCILLATIONS DURING MOLECULAR-BEAM EPITAXY - A COMPUTATIONAL MODELING APPROACH [J].
CLARKE, S ;
VVEDENSKY, DD .
PHYSICAL REVIEW LETTERS, 1987, 58 (21) :2235-2238
[4]   GROWTH-KINETICS AND STEP DENSITY IN REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION DURING MOLECULAR-BEAM EPITAXY [J].
CLARKE, S ;
VVEDENSKY, DD .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (07) :2272-2283
[5]   BIRTH DEATH MODELS OF EPITAXY .1. DIFFRACTION OSCILLATIONS FROM LOW INDEX SURFACES [J].
COHEN, PI ;
PETRICH, GS ;
PUKITE, PR ;
WHALEY, GJ ;
ARROTT, AS .
SURFACE SCIENCE, 1989, 216 (1-2) :222-248
[6]  
COHEN PI, 1986, THIN FILM GROWTH TEC, P69
[7]   INSITU ELLIPSOMETRY COMPARISON OF THE NUCLEATION AND GROWTH OF SPUTTERED AND GLOW-DISCHARGE A-SI-H [J].
COLLINS, RW ;
CAVESE, JM .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (10) :4146-4153
[8]   INSITU SPECTROSCOPIC ELLIPSOMETRY DURING MOLECULAR-BEAM EPITAXY OF CADMIUM MERCURY TELLURIDE [J].
DEMAY, Y ;
ARNOULT, D ;
GAILLIARD, JP ;
MEDINA, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :3139-3142
[9]   RELATIVISTIC DYNAMICAL THEORY OF ELECTRON DIFFRACTION [J].
FUJIWARA, K .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1961, 16 (11) :2226-&
[10]   SIMULATION-MODELS OF THE CRYSTAL VAPOR INTERFACE [J].
GILMER, GH ;
BROUGHTON, JQ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (02) :298-304