ZNSEXTE1-X FILMS GROWN BY PULSED LASER DEPOSITION

被引:14
|
作者
AYDINLI, A [1 ]
PUENTE, GC [1 ]
BHAT, A [1 ]
COMPAAN, A [1 ]
CHAN, A [1 ]
机构
[1] ENERGY CONVERS DEVICES INC,TROY,MI 48084
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 06期
关键词
D O I
10.1116/1.577168
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
An XeCl excimer laser was used to grow thin polycrystalline films of the ternary alloy semiconductor, ZnSexTe1-x, on sodium-free glass substrates. The laser ablation/evaporation process has produced films spanning the entire compositional range with x values close to those of the original target. At a typical growth temperature of 300-degrees-C, the grains possess orientations which vary from a predominant <111> for ZnTe to <311> for ZnSe with an increasing fraction of <311> as the ZnSe fraction increases. X-ray diffraction shows that the alloy lattice constant increases linearly with the x value, absorption measurements show band bowing similar to that observed in bulk single crystals, and Raman studies show that the lattice dynamics are characteristic of single-vibrational-mode behavior over the entire alloy range.
引用
收藏
页码:3031 / 3035
页数:5
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