ELECTRICAL-PROPERTIES OF ION-IMPLANTED PCALF FILMS

被引：4
|
作者：
DANN, AJ [1 ]
FAHY, MR [1 ]
JEYNES, C [1 ]
WILLIS, MR [1 ]
机构：
[1] UNIV SURREY,GUILDFORD GU2 5XH,SURREY,ENGLAND
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1987年 / 101卷 / 01期
关键词：
D O I：
10.1002/pssa.2211010141
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：K45 / K48
页数：4
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