THE LOCALIZATION AND CRYSTALLOGRAPHIC DEPENDENCE OF SI SUBOXIDE SPECIES AT THE SIO2/SI INTERFACE

被引：286

作者：

GRUNTHANER, PJ ^{[1
]}

HECHT, MH ^{[1
]}

GRUNTHANER, FJ ^{[1
]}

JOHNSON, NM ^{[1
]}

机构：

[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 02期

关键词：

D O I：

10.1063/1.338215

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：629 / 638

页数：10

共 32 条

[1] SPECTROSCOPIC ANALYSIS OF THE INTERFACE BETWEEN SI AND ITS THERMALLY GROWN OXIDE [J].

ASPNES, DE ;

THEETEN, JB .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (06) :1359-1365

[2] HYDRIDES AND HYDROXYLS IN THIN SILICON DIOXIDE FILMS [J].

BECKMANN, KH ;

HARRICK, NJ .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (04) :614-&

[3]

CHANG CC, 1978, P ELECTROCHEM SOC, V783, P106

[4] STUDIES OF THE SI-SIO2 INTERFACE BY MEV ION CHANNELING [J].

CHEUNG, NW ;

FELDMAN, LC ;

SILVERMAN, PJ ;

STENSGAARD, I .

APPLIED PHYSICS LETTERS, 1979, 35 (11) :859-861

[5]

FELDMAN LC, 1978, PHYS REV LETT, V41, P20

[6] INTERPRETATION OF XPS CORE LEVEL SHIFTS AND STRUCTURE OF THIN SILICON-OXIDE LAYERS [J].

FINSTER, J ;

SCHULZE, D ;

BECHSTEDT, F ;

MEISEL, A .

SURFACE SCIENCE, 1985, 152 (APR) :1063-1070

[7] HYDROGEN MIGRATION UNDER AVALANCHE INJECTION OF ELECTRONS IN SI METAL-OXIDE-SEMICONDUCTOR CAPACITORS [J].

GALE, R ;

FEIGL, FJ ;

MAGEE, CW ;

YOUNG, DR .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :6938-6942

[8] SURFACE-ROUGHNESS AT THE SI(100)-SIO2 INTERFACE [J].

GOODNICK, SM ;

FERRY, DK ;

WILMSEN, CW ;

LILIENTAL, Z ;

FATHY, D ;

KRIVANEK, OL .

PHYSICAL REVIEW B, 1985, 32 (12) :8171-8186

[9]

Grunthaner F. J., 1986, Insulating Films on Semiconductors. Proceedings of the International Conference INFOS 85, P1

[10] HIGH-RESOLUTION X-RAY PHOTOELECTRON-SPECTROSCOPY AS A PROBE OF LOCAL ATOMIC-STRUCTURE - APPLICATION TO AMORPHOUS SIO2 AND THE SI-SIO2 INTERFACE [J].

GRUNTHANER, FJ ;

GRUNTHANER, PJ ;

VASQUEZ, RP ;

LEWIS, BF ;

MASERJIAN, J ;

MADHUKAR, A .

PHYSICAL REVIEW LETTERS, 1979, 43 (22) :1683-1686

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