ARSENIC CLUSTERING IN SILICON

被引：89
作者：
SCHWENKER, RO
PAN, ES
LEVER, RF
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 08期
关键词：
D O I：
10.1063/1.1660706
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3195 / +
页数：1
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