KINETICS OF TUNGSTEN DEPOSITION BY REACTION OF WF6 AND HYDROGEN

被引：75
作者：
BRYANT, WA
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 09期
关键词：
D O I：
10.1149/1.2131711
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：1534 / 1543
页数：10
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