COMPARISON OF ZNS THIN-FILMS GROWN BY ATOMIC LAYER EPITAXY FROM ZINC ACETATE AND ZINC-CHLORIDE - AN X-RAY-DIFFRACTION AND SPECTROSCOPIC ELLIPSOMETRIC STUDY

被引：20

作者：

OIKKONEN, M ^{[1
]}

TAMMENMAA, M ^{[1
]}

ASPLUND, M ^{[1
]}

机构：

[1] HELSINKI UNIV TECHNOL,DEPT CHEM,SF-02150 ESPOO 15,FINLAND

来源：

MATERIALS RESEARCH BULLETIN | 1988年 / 23卷 / 01期

关键词：

D O I：

10.1016/0025-5408(88)90235-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：133 / 142

页数：10

共 17 条

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