ELECTRICAL AND OPTICAL-PROPERTIES OF BORON-DOPED ZNO THIN-FILMS FOR SOLAR-CELLS GROWN BY METALORGANIC CHEMICAL VAPOR-DEPOSITION

被引：240

作者：

WENAS, WW ^{[1
]}

YAMADA, A ^{[1
]}

TAKAHASHI, K ^{[1
]}

YOSHINO, M ^{[1
]}

KONAGAI, M ^{[1
]}

机构：

[1] TOKYO INST TECHNOL,DEPT ELECT & ELECTR ENGN,MEGURO KU,TOKYO 152,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 70卷 / 11期

关键词：

D O I：

10.1063/1.349794

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The highly conductive and textured ZnO films have been grown by metalorganic chemical vapor deposition using diethylzinc and H2O as reactant gases. The B2H6 gas has also been successfully used as an n-type dopant gas to obtain highly conductive ZnO with a sheet resistivity for 2-mu-m-thick film as low as 10 OMEGA/square at the very low temperature of 150-degrees-C. It was found that the crystal orientation and grain structure change with B2H6 flow rate. The decreasing of the film transmittance due to the free-carrier absorption in the wavelength region above 1000 nm was observed and it seems that the impurity scattering was the dominant interaction during this process. The shift of the absorption edge due to band filling was also observed as the B2H6 flow rate was increased.

引用

页码：7119 / 7123

页数：5

共 27 条

[11] GROUP-III IMPURITY DOPED ZINC-OXIDE THIN-FILMS PREPARED BY RF MAGNETRON SPUTTERING [J].

MINAMI, T ;

SATO, H ;

NANTO, H ;

TAKATA, S .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1985, 24 (10) :L781-L784

[12]

MITSUYU T, 1980, J APPL PHYS, V51, P2646

[13] THE INTERPRETATION OF THE PROPERTIES OF INDIUM ANTIMONIDE [J].

MOSS, TS .

PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON SECTION B, 1954, 67 (418) :775-782

[14] HIGHLY ORIENTED ZNO FILMS PREPARED BY MOCVD FROM DIETHYLZINC AND ALCOHOLS [J].

ODA, S ;

TOKUNAGA, H ;

KITAJIMA, N ;

HANNA, J ;

SHIMIZU, I ;

KOKADO, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (12) :1607-1610

[15]

PIER D, 1989, 9TH P EUR PHOT SOL E, P488

[16] ENHANCED PHOTOCURRENT ZNO/CDS/CUINSE2 SOLAR-CELLS [J].

POTTER, RR .

SOLAR CELLS, 1986, 16 (1-4) :521-527

[17] PROPERTIES OF ZINC-OXIDE FILMS PREPARED BY THE OXIDATION OF DIETHYL ZINC [J].

ROTH, AP ;

WILLIAMS, DF .

JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) :6685-6692

[18] OPTICAL-PROPERTIES AND QUANTUM EFFICIENCY OF A-SI1-XCX-H/A-SI-H SOLAR-CELLS [J].

SCHADE, H ;

SMITH, ZE .

JOURNAL OF APPLIED PHYSICS, 1985, 57 (02) :568-574

[19] PROPERTIES OF CONDUCTIVE ZINC-OXIDE FILMS FOR TRANSPARENT ELECTRODE APPLICATIONS PREPARED BY RF MAGNETRON SPUTTERING [J].

SCHROPP, REI ;

MADAN, A .

JOURNAL OF APPLIED PHYSICS, 1989, 66 (05) :2027-2031

[20] LASER-INDUCED MOCVD OF ZNO THIN-FILMS [J].

SHIMIZU, M ;

KATAYAMA, T ;

TANAKA, Y ;

SHIOSAKI, T ;

KAWABATA, A .

JOURNAL OF CRYSTAL GROWTH, 1990, 101 (1-4) :171-175

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