MEASUREMENT OF VELOCITY DISTRIBUTIONS OF SPUTTERED CARBON-ATOMS USING LASER-INDUCED FLUORESCENCE IN THE VACUUM UV

被引:27
作者
BOGEN, P [1 ]
DOBELE, HF [1 ]
MERTENS, P [1 ]
机构
[1] UNIV ESSEN GESAMTHSCH, FACHBEREICH PHYS, D-4300 ESSEN 1, FED REP GER
关键词
D O I
10.1016/0022-3115(87)90376-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:434 / 437
页数:4
相关论文
共 16 条
[1]  
ANDERSEN HH, 1981, SPUTTERING PARTICLE, V1
[2]   INVESTIGATION OF LIGHT-ION SPUTTERING OF TITANIUM USING LASER-INDUCED FLUORESCENCE [J].
BAY, HL ;
SCHWEER, B ;
BOGEN, P ;
HINTZ, E .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :732-737
[3]  
BOGEN P, IN PRESS
[4]   ANGULAR-DISTRIBUTION OF HIGH-ORDER ANTI-STOKES STIMULATED RAMAN-SCATTERING IN HYDROGEN [J].
BRINK, DJ ;
PROCH, D .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1983, 73 (01) :23-25
[5]  
Demtroder W., 1981, LASER SPECTROSCOPY
[6]   AMPLIFICATION OF 193 NM RADIATION IN ARGON-FLUORIDE AND GENERATION OF TUNABLE VUV RADIATION BY HIGH-ORDER ANTI-STOKES RAMAN-SCATTERING [J].
DOBELE, HF ;
ROWEKAMP, M ;
RUCKLE, B .
IEEE JOURNAL OF QUANTUM ELECTRONICS, 1984, 20 (11) :1284-1287
[7]   DETECTION OF CARBON IMPURITIES IN PLASMAS BY ATOMIC FLUORESCENCE SPECTROSCOPY [J].
DOBELE, HF ;
RUCKLE, B .
JOURNAL OF NUCLEAR MATERIALS, 1982, 111 (NOV-) :102-104
[8]   RAMAN-SPECTROSCOPY OF GASES WITH A FOURIER-TRANSFORM SPECTROMETER - THE SPECTRUM OF D2 [J].
JENNINGS, DE ;
WEBER, A ;
BRAULT, JW .
APPLIED OPTICS, 1986, 25 (02) :284-290
[9]  
KURUCZ RL, 1976, 374 SMITHS ASTR OBS
[10]   VELOCITY DISTRIBUTION OF HYDROGEN-ATOMS SPUTTERED FROM METAL-HYDRIDES [J].
MERTENS, P ;
BOGEN, P .
JOURNAL OF NUCLEAR MATERIALS, 1984, 128 (DEC) :551-554