THE SCANNING OPTICAL MICROSCOPE - A POWERFUL TOOL FOR FAILURE ANALYSIS OF ELECTRONIC DEVICES

被引：3

作者：

AZZINI, GA

ARMAN, G

MONTANGERO, P

机构：

[1] CSELT-Centro Studi, Laboratori Telecomunicazioni s.p.a., 10148 Torino, Via G. Reiss Romoli

来源：

MICROELECTRONICS AND RELIABILITY | 1992年 / 32卷 / 11期

关键词：

D O I：

10.1016/0026-2714(92)90461-S

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reviews the applications of the SOM* (scanning optical microscope) to the failure analysis of electronic and optoelectronic devices. Description of the instrument operation principles and operative modes are given. Applications towards different devices and different component materials are presented.

引用

页码：1599 / 1604

页数：6

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