PRECISELY CONTROLLED SHALLOW P+ DIFFUSIONS IN GAAS

被引：18

作者：

GHANDHI, SK

FIELD, RJ

机构：

来源：

APPLIED PHYSICS LETTERS | 1981年 / 38卷 / 04期

关键词：

D O I：

10.1063/1.92301

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：267 / 269

页数：3

共 8 条

[1] PSG MASKS FOR DIFFUSIONS IN GALLIUM-ARSENIDE [J].

BALIGA, BJ ;

GHANDHI, SK .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1972, ED19 (06) :761-&

[2]

CASEY HC, 1973, ATOMIC DIFFUSION SEM

[3] DIFFUSION OF ZINC IN GALLIUM ARSENIDE [J].

CUNNELL, FA ;

GOOCH, CH .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1960, 15 (1-2) :127-133

[4] ANODIC-OXIDATION OF GAAS IN MIXED SOLUTIONS OF GLYCOL AND WATER [J].

HASEGAWA, H ;

HARTNAGEL, HL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) :713-723

[5] ZN DIFFUSION IN GAAS UNDER CONSTANT AS PRESSURE [J].

LUQUE, A ;

MARTIN, J ;

ARAUJO, GL .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (02) :249-254

[6] OPEN TUBE DIFFUSION OF ZINC IN GALLIUM-ARSENIDE [J].

SHEALY, JR ;

BALIGA, BJ ;

GHANDHI, SK .

ELECTRON DEVICE LETTERS, 1980, 1 (06) :119-121

[7] HIGH SURFACE CONCENTRATION ZN DIFFUSION IN GAAS [J].

SHIH, KK .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (11) :1737-1740

[8] DIFFUSION WITH INTERSTITIAL-SUBSTITUTIONAL EQUILIBRIUM - ZINC IN GAAS [J].

WEISBERG, LR ;

BLANC, J .

PHYSICAL REVIEW, 1963, 131 (04) :1548-&

← 1 →