A QUARTZ CRYSTAL MICROBALANCE APPARATUS FOR STUDYING INTERACTIONS OF SOLVENTS WITH THIN POLYMER-FILMS

被引：5
|
作者：
PRICE, GJ
BULEY, JM
机构：
[1] School of Chemistry, University of Bath, Bath
来源：
PROGRESS IN ORGANIC COATINGS | 1991年 / 19卷 / 03期
关键词：
D O I：
10.1016/0033-0655(91)80029-I
中图分类号：
O69 [应用化学];
学科分类号：
081704 ;
摘要：
This paper describes an apparatus developed for studying the effects of solvents on thin polymer films using a quartz crystal microbalance. It is shown that both swelling and dissolution processes can be monitored over a wide range of systems. The main application was in the investigation of photoresist development and it is demonstrated that all the appropriate parameters - solvent composition, temperature, polymer molecular weight and radiation dose - on film dissolution are amenable to study in a convenient and economic manner.
引用
收藏
页码：265 / 274
页数：10
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