EVOLUTION OF OPTICAL THIN-FILMS BY SPUTTERING

被引：45

|

作者：

COLEMAN, WJ ^{[1
]}

机构：

[1] BATTELLE PACIFIC NORTHWEST LABS,RICHLAND,WA 99352

来源：

APPLIED OPTICS | 1974年 / 13卷 / 04期

关键词：

D O I：

10.1364/AO.13.000946

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：946 / 951

页数：6

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