ESCA INVESTIGATIONS OF ION-BEAM EFFECTS ON SURFACES

ESCA can be used for the investigation of ion-beam-induced effects, such as selective sputtering, implantation of primary ions and surface atoms, changes in crystal structure, decomposition and formation of compounds. In this paper the following questions are discussed. 1. (1) What happens during the bombardment of an oxide-to-metal interface? 2. (2) Does a lower limit exist with respect to primary ion dose, current density, mass and energy for the production of ion-beam-induced effects? In both cases the possibility of, and time needed for, the reconstruction of the initial state seem to be important factors. © 1979.