共 50 条
- [1] FABRICATION OF THIN FILMS WITH LOW INTERNAL STRESSES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (05): : 922 - &
- [2] FABRICATION OF THIN DIELECTRIC FILMS WITH LOW INTERNAL STRESSES JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1970, 7 (01): : 143 - +
- [3] INTERNAL MECHANICAL STRESSES IN THIN FERROELECTRIC FILMS. Soviet physics. Technical physics, 1982, 27 (05): : 634 - 637
- [4] Pyroelectric properties of ferroelectric thin films: Effect of internal stresses FERROELECTRIC THIN FILMS XII, 2004, 784 : 529 - 534
- [5] INTERNAL-STRESSES IN THIN GE, ZNS, AND ZNSE FILMS SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1982, 49 (08): : 508 - 510
- [9] Epitaxial growth of BaTiO3 thin films and their internal stresses Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 9 B (5168-5171):
- [10] Effect of Heat Treatment on Internal Stresses in PECVD SiNxHy Thin Films COMMAD: 2008 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS & DEVICES, 2008, : 181 - +