MORPHOLOGY AND STRUCTURE OF TIO2 THIN-LAYERS VS THICKNESS AND SUBSTRATE-TEMPERATURE

被引：94

作者：

LOTTIAUX, M

BOULESTEIX, C

NIHOUL, G

VARNIER, F

FLORY, F

GALINDO, R

PELLETIER, E

机构：

[1] FAC SCI ST JEROME,INTERACT PHOTON MAT LAB,F-13397 MARSEILLE 13,FRANCE

[2] ECOLE NATL SUPER PHYS,OPT SURFACES & COUCHES MINCES LAB,UA 1120,F-13397 MARSEILLE 13,FRANCE

[3] UNIV TOULON & VAR,GMET,UA 797,F-83130 LA GARDE,FRANCE

来源：

THIN SOLID FILMS | 1989年 / 170卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90627-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：107 / 126

页数：20

共 11 条

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