ABLATION OF POLY(2-HYDROXYETHYL METHACRYLATE) BY 193-NM EXCIMER LASER-RADIATION

被引:7
作者
CHIRILA, TV
VANSAARLOOS, PP
机构
[1] Lions Eye Institute, Nedlands, Western Australia, 6009, 2 Verdun Street, A Block
关键词
D O I
10.1002/app.1992.070440806
中图分类号
O63 [高分子化学(高聚物)];
学科分类号
070305 ; 080501 ; 081704 ;
摘要
Data on the ablation of poly (2-hydroxyethyl methacrylate) (PHEMA) by 193-nm radiation . pulses, produced by an ArF excimer laser, are presented for the first time and are compared with the data for poly(methyl methacrylate) (PMMA). The ablation rate of PHEMA is lower than that of PMMA and some possible explanations are advanced. The other features of the etch curves are similar and confirm a predicted ablative behavior of the addition polymers susceptible to depolymerization Geometric aspects of the ablated polymer's surface, and the influence of inhomogeneities in the material, are also presented and discussed.
引用
收藏
页码:1355 / 1363
页数:9
相关论文
共 59 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]  
[Anonymous], 1986, HYDROGELS MED PHARM
[3]   EXCIMER LASER ETCHING OF POLYIMIDE [J].
BRANNON, JH ;
LANKARD, JR ;
BAISE, AI ;
BURNS, F ;
KAUFMAN, J .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) :2036-2043
[4]   LOW-TEMPERATURE UV LASER ETCHING OF PMMA - ON THE MECHANISM OF ABLATIVE PHOTODECOMPOSITION (APD) [J].
BRAREN, B ;
SEEGER, D .
JOURNAL OF POLYMER SCIENCE PART C-POLYMER LETTERS, 1986, 24 (08) :371-376
[5]   GAS-CHROMATOGRAPHIC DETERMINATION OF PYROLYSIS PRODUCTS FROM POLY(2-HYDROXYETHYL METHACRYLATE) [J].
BRAUN, D ;
STEFFAN, R .
POLYMER BULLETIN, 1980, 3 (1-2) :111-114
[6]   THERMAL-DEGRADATION OF COPOLYMERS OF 2-HYDROXYETHYL METHACRYLATE AND ALKYL METHACRYLATES [J].
CHOUDHARY, MS ;
LEDERER, K .
EUROPEAN POLYMER JOURNAL, 1982, 18 (12) :1021-1027
[7]   DEPENDENCE OF PHOTOETCHING RATES OF POLYMERS AT 193 NM ON OPTICAL-ABSORPTION DEPTH [J].
COLE, HS ;
LIU, YS ;
PHILIPP, HR .
APPLIED PHYSICS LETTERS, 1986, 48 (01) :76-77
[8]   VELOCITY DISTRIBUTION OF MOLECULAR FRAGMENTS FROM POLYMETHYLMETHACRYLATE IRRADIATED WITH UV LASER-PULSES [J].
DANIELZIK, B ;
FABRICIUS, N ;
ROWEKAMP, M ;
VONDERLINDE, D .
APPLIED PHYSICS LETTERS, 1986, 48 (03) :212-214
[9]   SPECTROSCOPIC STUDIES OF ARF LASER PHOTOABLATION OF PMMA [J].
DAVIS, GM ;
GOWER, MC ;
FOTAKIS, C ;
EFTHIMIOPOULOS, T ;
ARGYRAKIS, P .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1985, 36 (01) :27-30
[10]   SELF-DEVELOPING UV PHOTORESIST USING EXCIMER LASER EXPOSURE [J].
DEUTSCH, TF ;
GEIS, MW .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (12) :7201-7204