ION-IMPLANTATION AND LASER TREATMENT OF III-V-COMPOUND SEMICONDUCTOR - A BRIEF REPORT

被引：5
作者：
OGALE, SB
机构：
[1] Department of Physics, University of Poona, Pune
来源：
BULLETIN OF MATERIALS SCIENCE | 1990年 / 13卷 / 1-2期
关键词：
compound semiconductors; Ion implantation; laser treatment;
D O I：
10.1007/BF02744857
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The progress in the area of applications of ion implantation and laser treatment to III-V semiconductors is reviewed. The achievements till todate are discussed alongwith the yet unresolved problems. © 1990 The Indian Academy of Sciences.
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页码：51 / 56
页数：6
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