ANNEALING OF LARGE VACANCY CLUSTERS IN SILICON

被引:0
作者
BARANOV, AI [1 ]
GERASIMENKO, NN [1 ]
DVURECHENSKII, AV [1 ]
SMIRNOV, LS [1 ]
机构
[1] ACAD SCI USSR,INST SEMICOND PHYS,NOVOSIBIRSK 90,USSR
来源
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1977年 / 11卷 / 01期
关键词
D O I
暂无
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
引用
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页码:53 / 56
页数:4
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