ANNEALING OF LARGE VACANCY CLUSTERS IN SILICON

被引：0

作者：

BARANOV, AI ^{[1
]}

GERASIMENKO, NN ^{[1
]}

DVURECHENSKII, AV ^{[1
]}

SMIRNOV, LS ^{[1
]}

机构：

[1] ACAD SCI USSR,INST SEMICOND PHYS,NOVOSIBIRSK 90,USSR

来源：

SOVIET PHYSICS SEMICONDUCTORS-USSR | 1977年 / 11卷 / 01期

关键词：

D O I：

暂无

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：53 / 56

页数：4

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