ANNEALING OF LARGE VACANCY CLUSTERS IN SILICON

被引：0
|
作者：
BARANOV, AI [1 ]
GERASIMENKO, NN [1 ]
DVURECHENSKII, AV [1 ]
SMIRNOV, LS [1 ]
机构：
[1] ACAD SCI USSR,INST SEMICOND PHYS,NOVOSIBIRSK 90,USSR
来源：
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1977年 / 11卷 / 01期
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D O I：
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中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
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页码：53 / 56
页数：4
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