LOW-PRESSURE GAS-BREAKDOWN IN COMBINED FIELDS

被引：56

作者：

LISOVSKY, VA

YEGORENKOV, VD

机构：

[1] Kharkov State University, Kharkov, 310077

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1994年 / 27卷 / 11期

关键词：

D O I：

10.1088/0022-3727/27/11/014

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper reviews measured and theoretical data relating to the low-pressure discharge breakdown in DC and uniform RF fields and their combination. The original results on determination of molecular constants of various gases from breakdown curves obtained by the authors are given. We have investigated the effect of the DC electric field on the RF breakdown pattern. In particular the influence of the DC electric field on the ambiguity region of the RF discharge breakdown curves has been determined. Breakdown equations in combined fields have been derived and comparison has been made between these equations and measured data. Simple analytical criteria for gas breakdown for a wide range of parameters have been given.

引用

页码：2340 / 2348

页数：9

共 43 条

[1]

ANASHKIN GA, 1987, RADIOTEKH ELEKTRON+, V32, P2567

[2] CLOSED-CYCLE PERFORMANCE OF A HIGH-POWER ELECTRIC-DISCHARGE LASER [J].

BROWN, CO ;

DAVIS, JW .

APPLIED PHYSICS LETTERS, 1972, 21 (10) :480-&

[3] HIGH-FREQUENCY GAS-DISCHARGE BREAKDOWN [J].

BROWN, SC .

PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1951, 39 (12) :1493-1501

[4]

CHENOT M, 1948, ANN PHYS-PARIS, V3, P277

[5]

Coburn J.W., 1982, PLASMA CHEM PLASMA P, V2, P1, DOI 10.1007/BF00566856

[6] RF AUGMENTATION IN CO2 CLOSED-CYCLE DC ELECTRIC-DISCHARGE CONVECTION LASERS [J].

ECKBRETH, AC ;

DAVIS, JW .

APPLIED PHYSICS LETTERS, 1972, 21 (01) :25-&

[7]

Engel A., 1955, IONIZED GASES

[8] BASIC CHEMISTRY AND MECHANISMS OF PLASMA-ETCHING [J].

FLAMM, DL ;

DONNELLY, VM ;

IBBOTSON, DE .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (01) :23-30

[9]

FRANCIS G., 1960, IONIZATION PHENOMENA

[10]

Fricke H, 1933, Z PHYS, V86, P464, DOI 10.1007/BF01341362

← 1 2 3 4 5 →