ELECTRICAL-CONDUCTIVITY OF SEMI-INSULATING POLYCRYSTALLINE SILICON AND ITS DEPENDENCE UPON OXYGEN-CONTENT

被引：53
作者：
NI, J
ARNOLD, E
机构：
来源：
APPLIED PHYSICS LETTERS | 1981年 / 39卷 / 07期
关键词：
D O I：
10.1063/1.92791
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：554 / 556
页数：3
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