FABRICATION AND CHARACTERIZATION OF ALST3/AL2O3 LANGMUIR-BLODGETT-FILM ALUMINA MULTILAYER STRUCTURE

被引：3

作者：

ZHENG, TH ^{[1
]}

LIU, LY ^{[1
]}

WANG, WC ^{[1
]}

ZHENG, JB ^{[1
]}

SHEN, YH ^{[1
]}

ZHANG, ZM ^{[1
]}

WANG, ZJ ^{[1
]}

机构：

[1] CHINESE ACAD SCI,SHANGHAI INST OPT & FINE MECH,SHANGHAI,PEOPLES R CHINA

来源：

THIN SOLID FILMS | 1991年 / 195卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(91)90281-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The fabrication of a Langmuir-Blodgett film/alumina multilayer structure of aluminium stearate (AlSt3)/alumina (Al2O3) is reported here for the first time. Three monolayers of AlSt3 and one Al2O3 layer form a period of the multilayer system with periodicity 11-13.5 nm. The first seven orders of Bragg peaks were observed in the low angle X-ray diffraction spectrum of an 11-layer AlSt3/Al2O3 sample. A comparison between the measurements and calculations of the X-ray diffraction pattern is presented. Auger electron spectroscopy depth profile measurements showed the modulated distribution of oxygen, carbon and aluminium and revealed the ion diffusion reaction between CdSt2 and Al2O3 film.

引用

页码：301 / 306

页数：6

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