THE DESIGN AND FABRICATION OF A MAGNETICALLY ACTUATED MICROMACHINED FLOW VALVE

被引：14
作者：
SMITH, RL
BOWER, RW
COLLINS, SD
机构：
[1] Department of Electrical Engineering and Computer Science, University of California, Davis
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 24卷 / 01期
关键词：
D O I：
10.1016/0924-4247(90)80047-9
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a magnetically actuated valve, manufactured by silicon and thin-film micromachining, is considered. An analysis of the magnetic circuit is made to determine the critical design parameters, and a fabrication sequence is described. An integrated array of these microvalves, when combined with chemical microsensors, is intended to form the basis of an automated flow distribution and chemical analysis system. The feasibility of magnetic actuation, an addressing scheme, and the fabrication process are discussed. © 1990.
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页码：47 / 53
页数：7
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