EFFECTS OF GRAIN-ORIENTATION ON HILLOCK FORMATION AND GRAIN-GROWTH IN ALUMINUM FILMS ON SILICON SUBSTRATES

被引：113
作者：
SANCHEZ, JE
ARZT, E
机构：
[1] Max-Planck-Institut fur Metallforschung, D-7000 Stuttgart
来源：
SCRIPTA METALLURGICA ET MATERIALIA | 1992年 / 27卷 / 03期
关键词：
D O I：
10.1016/0956-716X(92)90513-E
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：285 / 290
页数：6
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