Nanostructured Dy2O3 films: An XPS Investigation

被引：44

作者：

Barreca, Davide ^{[1
,2
]}

Gasparotto, Alberto ^{[3
,4
]}

Milanov, Andrian ^{[5
]}

Tondello, Eugenio ^{[3
,4
]}

Devi, Anjana ^{[5
]}

Fischer, Roland A. ^{[5
]}

机构：

[1] CNR, ISTM, I-35131 Padua, Italy

[2] Padova Univ, INSTM, Dept Chem, I-35131 Padua, Italy

[3] Padova Univ, Via Marzolo 1, I-35131 Padua, Italy

[4] INSTM, Dept Chem, I-35131 Padua, Italy

[5] Ruhr Univ Bochum, Lehrstuhl Anorgan Chem 2, Inorgan Mat Chem Grp, D-44780 Bochum, Germany

来源：

SURFACE SCIENCE SPECTRA | 2007年 / 14卷 / 01期

关键词：

Dy2O3; high-k; nanosystems; MOCVD; X-ray photoelectron spectroscopy;

D O I：

10.1116/11.20080702

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

The present investigation is devoted to the X-ray photoelectron spectroscopy (XPS) analysis of the main core levels (C 1s, O 1s, Dy 4d, Dy 3d) of a representative dysprosium (III) oxide thin film. The specimen was grown on Si (100) at 500 degrees C by metal organic chemical vapor deposition (MOCVD) starting from Dy ((iPrN)(2)CNMe2)(3) in an N-2/O-2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of dysprosium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed. (C) 2006 American Vacuum Society.

引用

页码：52 / 59

页数：8

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